The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

[18p-C201-1~7] Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

Sun. Mar 18, 2018 1:45 PM - 5:30 PM C201 (52-201)

Ken Nakamura(AIST), Yasuhito Gotoh(Kyoto Univ.)

2:15 PM - 2:45 PM

[18p-C201-2] TOF-SIMS analysis by means of low energy bismuth primary ion beam

〇Takuya Miyayama1 (1.ULVAC-PHI)

Keywords:TOF-SIMS, cluster ion beam, Molecular ion detection

In order to achieve fragmentation free or direct detection of molecular ions of secondary ions in TOF-SIMS, low energy bismuth cluster primary ion beam has been investigated. In the presentation, spectra taken by low energy Bi primary ion beam will be discussed, compared with typical high energy conditions.