The 83rd JSAP Autumn Meeting 2022

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21a-C306-1~10] 7.2 Applications and technologies of electron beams

Wed. Sep 21, 2022 9:00 AM - 11:45 AM C306 (C306)

Katsuhisa Murakami(AIST), Takafumi Ishida(Nagoya University)