[22p-A202-1~22] 6.2 Carbon-based thin films

[22p-A202-11] DC Glow Plasma Source with Boron-Doped Diamond Cathode

〇Hisao Miyazaki¹, Hisashi Yoshida¹, Shigeya Kimura¹ (1.Toshiba RDC)

Keywords:diamond, plasma, electron source

Diamond has properties required for a gas discharge cathode such as high secondary electron emission efficiency, ion sputtering resistance, and high melting point. It is also expected that the high thermal conductivity suppresses the overheat of the cathode resulting the high current density without glow-to-arc transition. We have fabricated a DC discharge device using a hollow cathode with an axial magnetic field. In this report, the discharge properties depending on the growth temperature of the boron-doped diamond cathode.