[22p-A202-1~22] 6.2 Carbon-based thin films

[22p-A202-12] Observation of Cobalt behavior on Untreated Cemented Carbide Substrate in Diamond Film Deposition by Hot Filament-CVD

〇Yoshinori Saiki¹, Bando Takahiro¹, Toru Harigai¹, Hirofumi Takikawa¹, Takahiro Hattori², Hiroaki Sugita², Natsue Kawahara³, Kunihiko Tanaka³ (1.Toyohashi Univ. Technol., 2.OSG Coating Service Co., Ltd, 3.Nagaoka Univ. Technol.)

Keywords:Nano crystalline diamond film, Hot Filament CVD method, Polycrystalline Diamond

Diamond-coated tools with high hardness and excellent wear resistance are used as cutting tools for difficult-machine materials such as CFRP. A hot filament chemical vapor deposition (HF-CVD) system is suitable as a deposition system to manufacture diamond-coated tools. On the other hand, anomalous growth is usually observed with diamond-thin films on WC-Co substrates, which are base materials of tools. In addition, the detailed mechanism of anomalous growth has not been clarified and should be investigated to develop a better way to prevent anomalous growth. In this study, MCD and NCD films with different deposition times were deposited by HF-CVD, and the mechanisms of anomalous growth and Co diffusion during the nucleation and film formation processes were investigated.