[24p-E204-1~10] 6.2 Carbon-based thin films

[24p-E204-3] Feature of DLC films sputtered by four targets facing sputtering cathode

〇Futa Kobayashi¹, Tetsuya Saruwatari¹, Kazuyuki Mabuchi¹ (1.Keihin Ramtech Co., Ltd)

Keywords:Hydrogen-free DLC, Four targets facing sputtering

We will discuss the features of hydrogen-free DLC deposited on glass substrates using four targets facing sputtering cathode (RAM cathode) developed by our company. The basic properties of the DLC deposited by RAM cathode are as follows: Raman spectroscopy G-band peak position 1546 cm-1, pencil hardness 7 H, surface smoothness Ra: 0.16 nm. The DLC deposited using RAM cathode is featured by its smoothness and high hardness.