The 70th JSAP Spring Meeting 2023

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8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)

Kazuhiro Karahashi(Osaka univ.), Sumiko Fujisaki(Hitachi, Ltd.)

5:30 PM - 5:45 PM

[17p-A205-18] Electronic properties of C2F4 and production mechanism of PTFE

〇Toshio Hayashi1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1, Naoto Kodama1, Hirotaka Toyada1 (1.Nagoya Univ.)

Keywords:Teflon, PTFE, polymerization

PTFE was accidentally discovered on April 6 , 1938. Dr. Roy J. Plunkett, working with gases related to C2F4 refrigerants. However, the synthetic mechanism have not been discussed in detail. We examined this subject by using computational chemistry method, and found PTFE was produced by electron attachment and subsequent polymerization.