[17p-PA05-1~3] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[17p-PA05-2] Detection of ionized space charges using a photonic-crystal-waveguide module

〇(B)Kousei Otsuka¹, Takeki Higashiguchi², Yu Shimomura², Kazuya Kikunaga³, Yasushi Takahashi² (1.Osaka Pref. Univ., 2.Osaka Met.Univ., 3.AIST.)

Keywords:photonic crystal, space charges, sensing

We have been developing a sensor for detecting space charges that cause electrostatic accidents, in which Si-photonic-crystal-waveguides are irradiated with electric charges, resulting in free carrier absorption inside and attenuation of the transmitted light intensity. Therefore, we fabricated a small module equipped with a Si photonic crystal waveguide chip and conducted experiments in which the module was irradiated with an electric charge. As a result, it was confirmed that the transmitted light intensity was attenuated and that the reproducibility was high.