[A-9] Imaging Sensors and Detectors

[A-9-04] Investigation of Au-InGaAs Alloy for Plasmonic InGaAs Waveguide Photodetector

〇Taketoshi Nakayama¹, Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1. Univ. of Tokyo (Japan))

Presentation style:

https://doi.org/10.7567/SSDM.2022.A-9-04

Au-InGaAs, which is an alloy of Au and InGaAs, was evaluated for fabricating a plasmonic InGaAs waveguide photodetector (PD). Spectroscopic ellipsometry revealed that Au-InGaAs has a negative permittivity, similar to Au, enabling a surface plasmon polariton at the Au-InGaAs/InGaAs interface. Using the measured permittivity, we numerically confirmed the existence of the plasmonic mode in the Au-InGaAs/InGaAs/Au-InGaAs waveguide, revealing the feasibility of a plasmonic InGaAs waveguide PD using alloy formation.