In-situ Counting of Process-Induced Particle

Kaoru Kondo; Kazuo Ichijo; Keisuke Shinohara; Tamio Hoshina; Kazuo Tsubouchi; Kazuya Masu

doi:https://doi.org/10.7567/SSDM.1991.PB7-2

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜 1991年8月29日
Pacifico Yokohama, Yokohama, Japan

[PB7-2] In-situ Counting of Process-Induced Particle

Kaoru Kondo、Kazuo Ichijo、Keisuke Shinohara、Tamio Hoshina、Kazuo Tsubouchi、Kazuya Masu (1.RION CO., Ltd.、2.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1991.PB7-2

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