[PC-2-3] Oxidation of Amorphous Silicon for Superior Thin Film Transistors (OASIS TFT)

Mitsutoshi MIYASAKA、Tadakazu KOMATSU、Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION Base Technology Research Center / Analysis Center)

https://doi.org/10.7567/SSDM.1996.PC-2-3