The Japan Society of Applied Physics

[Sympo.I-5] Thin Film Silicon on Insulator Substrate Considerations for CMOS Technologies

S. R. Wilson、T. Wetteroth、S. Hong、H. Shin、M. Racanelli、M. Huang (1.Materials Research and Strategic Technologies Communications Product Laboratories Motorola Semiconductor Products Sector)

https://doi.org/10.7567/SSDM.1996.Sympo.I-5