[A-11-3] Initial Stages of Cu Growth on Polyimide Deposited by Ionized Cluster Beam

N. Y. Kim、C. E. Hong、H.-S. Yoon、S. Y. Kim、K. W. Kim、Y. S. Lee、C. N. Whang (1.Dept. of Physics, Yonsei University、2.Dept. of Physics, Soongsil University、3.Dept. of Physics, Sunmoon University)

https://doi.org/10.7567/SSDM.1997.A-11-3