[J-7-4] Multi-Level-Storage in Lateral SbTeN-based Phase-Change Memory with an Additional Top TiN Layer

Y. Yin¹、K. Ota¹、T. Noguchi¹、H. Sone¹、S. Hosaka¹ (1.Gunma Univ., Japan)

https://doi.org/10.7567/SSDM.2008.J-7-4