The Japan Society of Applied Physics

[P-1-13] Significance of Interface Layer between Surface Layer and Si Substrate in Plasma-Exposed Structures and its Impacts on Plasma-Induced Damage Analysis

A. Matsuda1、Y. Nakakubo1、Y. Ueda1、H. Ohta1、K. Eriguchi1、K. Ono1 (1.Kyoto Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-13