[P-3-23] Multiple-gated Poly-Si Nanowire Thin-Film Transistors

T. W. Liu¹、H. H. Hsu¹、Z. M. Lin¹、C. D. Lin²、T. Y. Huang¹、H. C. Lin^1,2 (1.National Chiao Tung Univ.、2.National Nano Device Labs., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-3-23