[20p-P9-1~22] 13.8 化合物及びパワー電子デバイス・プロセス技術

▲ [20p-P9-5] Catalyst free direct deposition of multilayer graphene on GaN by solid phase precipitation.

〇(D)Uddin Md Sahab¹、Ueno Kazuyoshi^1,2 (1.Shibaura Inst. Tech.、2.SIT RCGI)

キーワード：GaN, Multilayer graphene, Solid phase precipitation.

We fabricated multilayer graphene (MLG) on n-GaN substrate directly without extra catalyst by solid phase precipitation. The characterization made by Raman Spectroscopy and SEM revealed that the MLGs produced were crystalline and crystallinity was increased with annealing temperature. With further improvement of MLG quality, this might be a method for MLG fabrication on GaN for diode application.