The Japan Society of Applied Physics

[PD-2-5] In-Situ Observation of Silicide Formation on Hydrogen-Terminated Si Surface by UHV-STM and LEED

S. Shingubara、S. Takata、S. Shinabe、E. Takahashi、T. Tanaka、H. Sakaue、T. Takahagi (1.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1996.PD-2-5