[2I05-10] Applications of Ion Beam

[2I08] High Resolution Li Deth Profiling of Thin Films Stacked Li Ion Battery by Means of TERD Technique with High Energy Light Ion Beams

*Kenji Morita¹, Bun Tsuchiya², Junji Oonishi³, Takayuki Yamamoto³, Ysutoshi Iriyama³, Takuya Majima⁴, Hidetsugu Tsuchida⁴, Koutaku Suzuki⁵, Nohiro Mitsukuchi³ (1. Nagoya Industrial Science Research Institute, 2. Meijo University, 3. Nagoya University, 4. Kyoto Univeristy, 5. The Wakasa-wan Energy Research Center)

Keywords:MeV Ion Beam Materials Analysis, Solid State Li Ion Battery, High Energy Light Ion Beam

High resolution depth profiles of Li in thin films stacked Li ion battery,which have been measured by means of the transmission elastic recoil detection technique with 5MeV He⁺² ion beam under charging, are presented. The results are compared with the previous data obtained with 9MeVO⁺⁴ ion beam.