[1N01-04] Application of Quantum Beam

[1N02] Study on radiation-induced reaction mechanism of EUV resist containing Sn

*Yui Takata¹, Yusa Muroya¹, Takahiro Kozawa¹, Satoshi Enomoto², Bilal Naqvi³, Danilo De Simone³ (1. Osaka Univ. SANKEN, 2. Toyo Gosei, 3. imec)

Keywords:radiation chemistry, EUV resist, organotin compound, pulse radiolysis, gamma radiolysis

The reaction mechanisms of EUV resists containing Sn were analyzed by electron beam pulse radiolysis and gamma radiolysis to reveal radiation-induced mechanisms and to gain guidelines for EUV resist polymer.