[CThP12D] Hybrid Material Integration for Silicon Photonics II

[CThP12D-06] Single soliton generation with deuterated SiN ring resonator fabricated at low temperature

*Takuma Aihara¹, Tatsurou Hiraki¹, Hidetaka Nishi¹, Tai Tsuchizawa¹, Shinji Matsuo¹ (1. NTT Device Technology Labs, NTT Corporation (Japan))

[Presentation Style] Online

We demonstrate single soliton generation in a SiN ring resonator using deuterated SiN film deposited at low temperature. The results show that comb generators can be integrated in photonic integrated circuits by using the back-end-on-line process.