[CThP5D] Surface Micromachining and Nanostructuring

[CThP5D-02 (Invited(P))] High-speed ablation of crystalline silicon by femtosecond laser BiBurst mode with GHz burst in MHz burst

*Kotaro Obata¹, Francesc Caballero-Lucas¹, Shota Kawabata^1,2, Godai Miyaji², Koji Sugioka¹ (1. Riken (Japan), 2. Tokyo Univ. of A. and T. (Japan))

[Presentation Style] Onsite

We demonstrate highly efficient ablation of silicon without degrading the ablation quality by use of femtosecond laser BiBurst mode, which is composed of GHz bursts in MHz bursts.