The 102nd CSJ Annual Meeting

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Academic Program [Oral A]

18. Polymer » Oral A

[C203-1am] 18. Polymer

Wed. Mar 23, 2022 9:00 AM - 11:20 AM C203 (Online Meeting)

Chair: Takahiro Kakuta, Masayuki Gon

10:40 AM - 10:50 AM

[C203-1am-11] Photosensitivity characteristic of black chemically amplified resists containing acid amplifiers

○Takafumi Watanabe1, Daisuke Aoki1, Koji Arimitsu1 (1. Fac. Sci. and Tech., Tokyo Univ. of Sci.)

[Lang.] Japanese

Keywords:acid amplifier, chemically amplified resist, black resist