[C205-3am] 20. Materials Chemistry -Basic and Application-

[C205-3am-04] Synthesis of thick diamond films using In-liquid Microwave Plasma CVD

^○Naoaki Kubota¹, Yusuke Tominaga¹, Chiaki Terashima^1,2, Hiroshi Uetsuka³, Naoya Ishida², Akira Fujishima² (1. Tokyo University of Science Faculty of Science and Technology Department of Pure and Applied Chemistry, 2. Tokyo University of Science Research Institute for Science and Technology Research Center for Space System Innovation, 3. Asahi Diamond Industrial Co., Ltd.)

[Lang.] Japanese

Keywords:diamond, Chemical Vapor Deposition, plasma, In-liquid Microwave Plasma CVD