[D201-1am] 06. Analytical Chemistry

[D201-1am-06] Area-selective atomic layer deposition of metal oxides on organic molecular layers

^○Takeshi Ono¹, Takuro Hosomi¹, Kazuki Nagashima¹, Tsunaki Takahashi¹, Wataru Tanaka¹, Masaki Kanai¹, Takeshi Yanagida¹ (1. The University of Tokyo)

[Lang.] Japanese

Keywords:Atomic Layer Deposition, Self-Assembled Monolayer, Nanowire