[K202-4am] 02. Theoretical Chemistry, Chemoinformatics, and Computational Chemistry

[K202-4am-09] Analysis and determination of rate coefficients of elementary reactions in the growth mechanism of silicon crystals

^○Mana Ishizuka¹, Katsunori Yamaguchi¹, Nilson Kunioshi¹ (1. Waseda University)

[Lang.] Japanese

Keywords:Reaction Dynamics, Chemical Vapor Deposition, Simulation, Quantum chemical calculation, Transition State Theory