Submicron structures created on metal thin films by submicron focusing of femtosecond EUV light pulses

Akihisa Ansai

Presentation information

Academic Program [Oral A]

05. Physical Chemistry -Chemical Kinetics and Dynamics- » Oral A

[K205-2vn] 05. Physical Chemistry -Chemical Kinetics and Dynamics-

Thu. Mar 23, 2023 4:10 PM - 5:50 PM K205 (K205, Lecture Hall Bldg. [2F])

Chair: Akihiro Furube, Masahide Terazima

5:30 PM - 5:40 PM

[K205-2vn-08] Submicron structures created on metal thin films by submicron focusing of femtosecond EUV light pulses

^○Akihisa Ansai¹, Hiroto Motoyama¹, Atsushi Iwasaki¹, Hidekazu Mimura², Kaoru Yamanouchi¹ (1. Department of Chemistry, School of Science, The University of Tokyo, 2. Department of Precision Engineering, School of Engineering, The University of Tokyo)

[Lang.] Japanese

Keywords:femtosecond EUV light pulses