Wed. Jun 29, 2022 1:00 PM - 2:40 PM レジスト除去、エッチング、洗浄 (B3-5)

座長:石島 達夫(金沢大学)、堀邊 英夫(大阪公立大学)

Wed. Jun 29, 2022 2:40 PM - 3:50 PM レジスト除去、エッチング、洗浄 (B3-5)

座長:神村 共住(大阪工業大学)、堀邊 英夫(大阪公立大学)

Wed. Jun 29, 2022 3:50 PM - 4:50 PM レジスト除去、エッチング、洗浄 (B3-5)

座長:部家 彰(兵庫県立大学)、堀邊 英夫(大阪公立大学)

Wed. Jun 29, 2022 1:00 PM - 2:40 PM Nanoimprint (A6)

Chairman:Yoshihiko Hirai(Osaka Metropolitan University), Hiroaki Kawata(Osaka Metropolitan University)

Wed. Jun 29, 2022 3:00 PM - 4:40 PM Nanoimprint (A6)

Chairman:Kazuma Kurihara(Advanced Industrial Science and Technology ), Jun Taniguchi(Tokyo University of Science)

Wed. Jun 29, 2022 1:00 PM - 3:00 PM Nanobiotechnology (A2)

Chairman:Kohei Soga(Tokyo University of Science), Hiroaki Takehara(The University of Tokyo)

Wed. Jun 29, 2022 3:00 PM - 4:50 PM Nanobiotechnology (A2)

Chairman:Takanori Ichiki(The University of Tokyo), Masakazu Umezawa(Tokyo University of Science)

Wed. Jun 29, 2022 3:00 PM - 4:40 PM Photopolymers in 3-D Printing / Additive Manufacturing (A8)

Chairman:Akira Watanabe(Tohoku University), Masaru Mukai(Yokohama National University)