Thu. Jun 30, 2022 1:00 PM - 2:00 PM General Scopes of Photopolymer Science and Technology (A14)

Chairman:Masayuki Endo(Osaka University)

Thu. Jun 30, 2022 9:00 AM - 12:10 PM General Scopes of Photopolymer Science and Technology (B3)

座長:遠藤 政孝(大阪大学)

Thu. Jun 30, 2022 9:00 AM - 11:30 AM Computational / Analytical Approach for Lithography Processes (A4)

Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)

Thu. Jun 30, 2022 9:00 AM - 10:40 AM Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices (A10)

Chairman:Takumi Ueno(Shinshu University), Masao Tomikawa(Toray)

Thu. Jun 30, 2022 9:30 AM - 11:00 AM プラズマ光化学と高分子表面機能化 (B2)

座長:笹井 泰志、近藤 伸一

Thu. Jun 30, 2022 10:00 AM - 10:40 AM 2D and Stimuli Responsive Materials for Electronics & Photonics (A9)

Chairman:Takashi Yamashita, FRSC(Tokyo University of Technology), Shu Seki, FRSC(Kyoto University)

Thu. Jun 30, 2022 10:40 AM - 12:00 PM Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices (A10)

Chairman:Sanjay Malik(FUJIFILM ELECTRONIC MATERIALS U.S.A.), Akira Watanabe(Tohoku University)

Thu. Jun 30, 2022 11:00 AM - 12:15 PM プラズマ光化学と高分子表面機能化 (B2)

座長:井上 泰志、近藤 伸一

Thu. Jun 30, 2022 1:00 PM - 2:40 PM Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices (A10)

Chairman:Tetsuya Enomoto(Showa Denko Materials), Takumi Ueno(Shinshu University)

Thu. Jun 30, 2022 2:00 PM - 4:00 PM Panel Symposium：“Beyond Sub-10 nm Lithography – From a Material Design and Development Perspective–“ (P1)

Chairman:Teruaki Hayakawa(Tokyo Institute of Technology)