Grazing Incident Resonant Soft X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV resist.

Presentation information

EUV Lithography

Wed. Jun 29, 2022 1:50 PM - 4:00 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

2:30 PM - 2:50 PM

*Atsunori Nakamoto¹, Shinji Yamakawa¹, Tetsuo Harada¹, Takeo Watanabe¹ (1. University of Hyogo)