The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A508-13] EUV Lithography III

Wed. Jun 29, 2022 1:50 PM - 4:00 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

3:20 PM - 3:50 PM

[2A512] Effect of alternative developer solutions on EUVL patterning [Invited]

*JULIUSJOSEPH SANTILLAN1, TOSHIRO ITANI1 (1. Osaka University)