Wed. Jun 29, 2022 3:00 PM - 4:40 PMNanoimprint (A6)
Chairman:Kazuma Kurihara(Advanced Industrial Science and Technology ), Jun Taniguchi(Tokyo University of Science)
Schedule
2
3:20 PM - 3:40 PM
[2A607] Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene
*Kenta Suzuki1, Tatsuya Okawa1, Sung-Won Youn1(1. National Institute of Advanced Industrial Science and Technology (AIST))