2:00 PM - 4:00 PM
Presentation information
Panel Symposium"Beyond Sub-10 nm Lithography-From a Material Design and Development Perspective-"
[3P101-01] P1: Panel Symposium: "Beyond Sub-10 nm Lithography - From a Materials Design and Development Perspective -"
Thu. Jun 30, 2022 2:00 PM - 4:00 PM Panel Symposium:“Beyond Sub-10 nm Lithography – From a Material Design and Development Perspective–“ (P1)
Chairman:Teruaki Hayakawa(Tokyo Institute of Technology)