ICSCRM2019

Presentation information

Print

Oral Presentation

Characterization and Defect Engineering

[Fr-3B] Device-related Characterization

Fri. Oct 4, 2019 1:00 PM - 2:15 PM Annex Hall 2 (Kyoto International Conference Center)

2:00 PM - 2:15 PM

[Fr-3B-05LN] Microscopic FCA system for carrier lifetime measurement in SiC with high spatial resolution

*Keisuke Nagaya1, Takashi Hirayama1, Takeshi Tawara2,3, Koichi Murata4, Hidekazu Tsuchida4, Akira Miyasaka5, Kazutoshi Kojima3, Tomohisa Kato3, Hajime Okumura3, Masashi Kato1 (1. Nagoya Inst.(Japan), 2. Fuji Electric Co., Ltd.(Japan), 3. AIST(Japan), 4. CRIEPI(Japan), 5. Showa Denko(Japan))