[We-1A] Interface Defect Structures

[We-1A-03] Effects of nitrogen on density of states at MOSFET interface

*Mark Anders¹, Patrick M Lenahan², Arthur H Edwards³, Peter A Schultz⁴, Renee M Van Ginhoven³ (1. National Institute of Standards and Technology(United States of America), 2. Pennsylvania State University(United States of America), 3. Air Force Research Laboratory(United States of America), 4. Sandia National Laboratories(United States of America))