[We-1A] Interface Defect Structures

[We-1A-06] Electrically-detected-magnetic-resonance study on interface defects at a-face and m-face 4H-SiC/SiO₂ interfaces

*Eito Higa¹, Mitsuru Sometani², Shinsuke Harada², Hiroshi Yano¹, Takahide Umeda¹ (1. Univ. of Tsukuba.(Japan), 2. National Inst. of Advanced Indus. Sci. and Tech.(Japan))