[We-2A] Inversion Layer Transport

[We-2A-05] Spatially Resolved Defect Mapping of the SiO₂/4H-SiC Interface

*Judith Woerle^1,2, Brett Johnson³, Corrado Bongiorno⁴, Kohei Yamasue⁵, Gabriel Ferro⁶, Dipanwita Dutta², Yasuo Cho⁵, Ulrike Grossner¹, Massimo Camarda^2,1 (1. ETH Zurich(Switzerland), 2. Paul Scherrer Institute(Switzerland), 3. University of Melbourne(Australia), 4. IMM-CNR Catania (Italy), 5. Tohoku University(Japan), 6. Université de Lyon(France))