Development of Soft X-Ray Laser Irradiation Beamline for Damage Examination of Soft X-Ray/EUV Optics

Masahiko Ishino

講演情報

Poster

Radiation sources and applications

[3P61-75] Poster Session [Radiation sources and applications]

2019年9月24日(火) 15:00 〜 16:40 Room D [Middle Assembly Room] (Osaka City Central Public Hall)

15:00 〜 16:40

[3P67] Development of Soft X-Ray Laser Irradiation Beamline for Damage Examination of Soft X-Ray/EUV Optics

*Masahiko Ishino¹, Thanh-Hung Dinh¹, Noboru Hasegawa¹, Masaharu Nishikino¹ (1. National Institutes for Quantum and Radiological Science and Technology(Japan))

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