[3P61-75] Poster Session [Radiation sources and applications]

[3P69] Laser Produced Plasma EUV source for Materials Testing

*Nozomi Tanaka¹, Kosuke Takagaki¹, Hiroaki Nishimura^1,2 (1. Institute of Laser Engineering, Osaka University(Japan), 2. Faculty of Engineering, Fukui University of Technology(Japan))