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[R1P-01] Verification of the Effect of Plasma Etching for Rock Thin Sections
[Presentation award entry]
Keywords:Plasma etching, SEM-EBSD, Olivine
In SEM-EBSD analysis, removal of the damaged layer by polishing during thin section preparation is important to obtain accurate crystallographic information of minerals. In this study, we examined the effect of plasma etching, which is seldom used in Earth science field. We measured the steps of olivine etched by atmospheric plasma, measured the transmittance of Os coatings etched by atmospheric and Ar plasma, and verified EBSD data of the peridotite thin sections etched by atmospheric plasma.