[G] Surface, Interface, and Catalysts

[104] Influence of annealing in air on the mechanical properties and microstructure of CrN-SiCN coatings

*SAKURAI Akihiko¹, Tsutiya Taiki², Matsuda Kenji², Shiojiri Makoto³, Kawasaki Masahiro⁴, Ikeno Susumu⁵, Nose Masateru⁵, Lee Seungwon² (1. University of Toyama, 2. University of Toyama, 3. Professor emeritus Kyoto Institute of Technology, 4. Applied Materials, Inc., 5. Professor emeritus University of Toyama)

Keywords:CrN-SiCN、熱処理、TEM

本研究ではCrN-SiCN複合膜に大気中で熱処理を施し, 熱処理がCrN-SiCN複合膜の機械的性質や構造に及ぼす影響を調査した。