日本金属学会2022年秋期(第171回)講演大会

Presentation information

一般講演

9.Electric/Electronic/Optical Materials » Electric/Electronic/Optical Materials

[G] Electric/Electronic/Optical Materials

Fri. Sep 23, 2022 12:30 PM - 4:30 PM Rm. G (D31,3Flr. Build.D)

Chair:Yuta Saito

12:30 PM - 1:00 PM

[116] Improvement of Functional Chalcogenides and their Application to Next-Generation Electronic Devices

*Yuta SAITO1 (1. AIST D-Tech)

Keywords:カルコゲナイド薄膜、スパッタ法、層状物質、相変化メモリ、電子デバイス

Improvement of Functional Chalcogenides and their Application to Next-Generation Electronic Devices

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