Oral presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Thu. Sep 19, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

[19a-B4-1] [Young Scientist Oral Presentation Award Speech](15 min.) Fabrication of MEMS Mirror Using Thick-film PZT/PZT Bimorph Structure

^○Junichi Inoue¹, Kensuke Kanda^1,2, Takashi Saito², Takashi Fujita^1,2, Kazusuke Maenaka^1,2 (University of Hyogo¹, JST²)

9:15 AM - 9:30 AM

▲ [19a-B4-2] Size effect on the single crystal diamond NEMS resonators

^○Meiyong Liao¹, Masaya Toda², Liwen Sang¹, Masataka Imura¹, Shunichi Hishita¹, Shuji Tanaka², Yasuo Koide¹ (National Institute for Materials Science¹, Tohoku University²)

9:30 AM - 9:45 AM

△ [19a-B4-3] Asymmetrical surface lattice structures of plasmonic metamaterials for multi-wavelength selective uncooled infrared sensor

^○Yousuke Takagawa¹, Kyouhei Masuda¹, Shinpei Ogawa², Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

9:45 AM - 10:00 AM

△ [19a-B4-4] Polarization selective uncooled infrared sensor by asymmetrical plasmonic metamaterial

^○Kyouhei Masuda¹, Yousuke Takagawa¹, Shinpei Ogawa², Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

10:00 AM - 10:15 AM

[19a-B4-5] Heterogeneously Integrated Fluorescence Detection Devices －Integration of A Excitation Source－

^○Keiko Sumitomo¹, Sachiko Ito¹, Ryo Takigawa¹, Noriyuki Tsujimura¹, Hisayuki Kato¹, Takeshi Kobayashi¹, Ryutaro Maeda¹, Toshihiro Kamei¹ (AIST UMEMSME¹)

10:15 AM - 10:30 AM

▼ [19a-B4-6] In-plane Nano-electro-mechanical Resonators: Design, Fabrication and Measurement

^○(P)Faezeh Arab Hassani¹, Cecilia Dupre², Eric Ollier², Sebastian T Bartsch³, Adrian Mihai Ionescu³, Yoshishige Tsuchiya⁴, Hiroshi Mizuta⁴ (JAIST¹, CEA-LETI², EPFL³, Univ. of Southampton⁴)

Break (10:30 AM - 10:45 AM)

10:45 AM - 11:00 AM

[19a-B4-7] Photo-Patternable and Adhesive Polymer for Wafer-Scale Microfluidic Device Fabrication

^○Katsuhiko Hieda¹, Tom Miyazaki², Sara Peters², Paru Deshpande³, Liesbet Lagae³, John O'Callghan³, Josine Loo³, Chengxun Liu³, Bivragh Majeed³, Karolien Jans³ (JSR Corporation¹, JSRMicro N.V.², IMEC³)

11:00 AM - 11:15 AM

[19a-B4-8] A microchip for rapid detection of bacteria V – Relationship between culture condition and fluorescence -

^○Ryuhei Hayashi¹, Hirokazu Nakazawa¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida^2,3, Noboru Ishihara², Kazuya Masu², Changle Wang⁴, Kenichirou Iida⁴, Mitsumasa Saitou⁴, Shinichi Yoshida⁴ (Toyohashi Univ. of Technology¹, Tokyo Institute of Technology², NTT-AT³, Graduate School of Medical Sciences, Kyushu Univ⁴)

11:15 AM - 11:30 AM

[19a-B4-9] Room-Temperature Micro-I/O interconnect of qVGA Array Using Ultrasonic Bonding of Compliant Bump

^○Keiichiro Iwanabe¹, Takanori Shuto¹, Tanemasa Asano¹ (Kyushu Univ.¹)

11:30 AM - 11:45 AM

[19a-B4-10] Improvement of displacement sensor output of self-sensitive piezoelectric MEMS micro cantilevers by tuning the PZT thin films

^○takeshi kobayashi¹, shoji oyama², natsumi makimoto¹, hiroshi funakubo³, ryutaro maeda¹ (AIST¹, Hirose electric Co.², Tokyo Inst. of Technology³)

11:45 AM - 12:00 PM

△ [19a-B4-11] Fabrication of variable transmission optical attenuator based on subwavelength grating

^○Hiroaki Honma¹, Kazuhiro Takahashi¹, Hiromu Ishii¹, Makoto Ishida¹, Kazuaki Sawada¹ (Toyohashi University of Technology¹)

12:00 PM - 12:15 PM

[19a-B4-12] Optomechanical properties of MEMS Fabry-Perot interferometric surface stress sensor

^○Kazuhiro Takahashi¹, Ryo Ozawa¹, Makoto Ishida¹, Kazuaki Sawada¹ (Toyohashi University of Technology¹)