[16a-B5-1~11] 15.4 III-V-group nitride crystals

[16a-B5-9] Helicon-wave-excited-plasma sputtering epitaxy of Nb-doped n⁺⁺-type (001) anatase films on Mg-doped p-type (0001) GaN and their transport prooerties

^○Masahiro Yamagishi¹, Kouji Hazu¹, Tomomi Ohtomo¹, Youichi Ishikawa¹, Kentaro Furusawa¹, Tokuyuki Nakayama², Shigefusa Chichibu¹ (IMRAM and Appl. Phys. Dept., Tohoku Univ.¹, Sumitomo Metal Mining Co., Ltd.²)

Keywords:二酸化チタン