The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[16p-A13-1~14] 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

4:30 PM - 4:45 PM

[16p-A13-11] Adhesion improvement of water-soluble inorganic resist on TaN layer

○Hirohito Tanino1, Tsubasa Fukui1, Masato Yamaguchi1, Kazuya Emura1, Makoto Okada1, Tetsuo Harada1, Takeo Watanabe1, Hiroo Kinoshita1 (Univ. of Hyogo1)

Keywords:EUV