Development of high-reflective W/Si multilayer supermirror for soft X-ray grating

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

5:00 PM - 5:15 PM

^○Masaki Kuki¹, Tetsuo Harada¹, Takeo Watanabe¹, Hiroo Kionoshita¹ (University of Hyogo¹)

Keywords:スーパーミラー,多層膜,EUVリソグラフィー