The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[16p-A13-1~14] 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

2:15 PM - 2:30 PM

[16p-A13-3] Laser Delineation of Slit Patterns onto Fine Stainless-Steel Pipes

○Hiroshi Sakabe1, Toshiyuki Horiuchi1 (Tokyo Denki Univ.1)

Keywords:レーザ走査リソグラフィ