The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[16p-A13-1~14] 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

2:30 PM - 2:45 PM

[16p-A13-4] Non-destructive Inspection of Patterns Formed on Inner Surface of Fine Pipes

○(M1)Nozomi Kimura1, Keisuke Sato2, Toshiyuki Horiuchi1,2 (Tokyo Denki Univ1, Tokyo Denki Univ2)

Keywords:内面リソグラフィ,非破壊観察