The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[16p-A13-1~14] 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

2:45 PM - 3:00 PM

[16p-A13-5] Fabrication of Concave Patterns Arrayed Densely in an Orthogonal Matrix

○(M1)Ryunosuke Sasaki1, Keigo Komatsubara2, Toshiyuki Horiuchi1,2 (Tokyo Denki Univ.1, Tokyo Denki Univ.2)

Keywords:micro lens array