Design and Creation of Three-Dimensional Nanomechancal Resonator for Improving Q Factor

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

3:00 PM - 3:15 PM

^○Kenji Yamazaki¹, Hiroshi Yamaguchi¹ (NTT Basic Research Labs.¹)

Keywords:3Dナノ加工,ナノメカニカル共振器