[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-4] Vacancies Evaluation of CZ silicon crystal by low temperature ultrasonic measurement and secondary defect measurement (1): Correlation of void defects and the softening

^○Hiroyuki Saito¹, Kazuki Okabe^1,4, Kazuhiko Kashima¹, Hiroshi Kaneta^2,4, Yoshihiko Saito³, Yuichi Nemoto⁴, Terutaka Goto⁴ (GWJ¹, Kyushu Inst. of Tech.², Toshiba³, Niigata Univ.⁴)

Keywords:CZシリコン,ボイド,空孔